国家自然科学基金资助项目61773279;系统控制与信息处理教育部重点实验室开放课题基金资助项目Scip201608;微光机电系统技术教育部重点实验室天津大学开放基金资助项目MOMST 2016-4. Supported by the National Natural Science Foundation of China61773279;the Research Foundation of Key Laboratory of System Con-trol and Information Processing of Ministry of EducationScip201608;the Open Project of Key Laboratory of Micro Opto-Electro Mechanical System Technology of Ministry of EducationTianjin UniversityMOMST 2016-4